Publikationen von M. Winter
Alle Typen
Zeitschriftenartikel (1)
2003
Zeitschriftenartikel
9 (3), S. 149 - 156 (2003)
A study on the metal-organic CVD of pure copper films from low cost copper(II) dialkylamino-2-propoxides: Tuning the thermal properties of the precursor by small variations of the ligand. Chemical Vapor Deposition