Scanning Electron Microscopy (SEM)

Scanning electron microscopy is employed to visualize details of the sample surface on the nano meter scale.

  • Ultra high resolution scanning electron microscopy with a point resolution of up to 4 Å at 30 kV (Hitachi S-5500)
  • Combination with bright field and dark field scanning transmission electron microscopy (STEM)
  • Elemental analysis using EDS achieving nano meter resolution
  • SEM of bulk samples in combination with EDS and under variable pressure (Hitachi S-3500N)
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